ISO 25178-605 2025.docx
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1、ISOInternationalStandardISO25178-605Secondedition2025-02Geometricalproductspecifications(GPS)Surfacetexture:ArealPart605:Designandcharacteristicsofnoncontact(pointautofocusprobe)instrumentsSpecificationgeometriquedesproduits(GPS)Etatdesurface:Surfacique一Partie605:ConceptionetCaracteristiquesdesinstr
2、umentssanscontact(capteurautofocusapoint)ReferencenumberISO25178-605:2025(en)COPYRIGHTPROTECTEDDOCUMENTISO2025Allrightsreserved.Unlessotherwisespecified,orrequiredinthecontextofitsimplementation,nopartofthispublicationmaybereproducedorutilizedotherwiseinanyformorbyanymeans,electronicormechanical,inc
3、ludingphotocopying,orpostingontheinternetoranintranet,withoutpriorwrittenpermission.PermissioncanberequestedfromeitherISOattheaddressbeloworISO,smemberbodyinthecountryoftherequester.ISOcopyrightofficeCP401Ch.deBlandonnet8CH-1214Vernier,GenevaPhone:+41227490111Email:copyrightiso.orgWebsite:www.iso.or
4、gPublishedinSwitzerlandContentsPageForewordivIntroductionv1 Scope12 Normativereferences13 Termsanddefinitions14 Instrumentrequirements35 Metrologicalcharacteristics46 Designfeatures47 Generalinformation4Annex A (informative)PrinciplesofPAPinstrumentsforarealsurfacetopographymeasurement5Annex B (info
5、rmative)SourcesofmeasurementerrorforPAPinstruments9Annex C (informative)RelationshiptotheGPSmatrixmodel15Bibliography16ForewordISO(theInternationalOrganizationforStandardization)isaworldwidefederationofnationalstandardsbodies(ISOmemberbodies).TheworkofpreparingInternationalStandardsisnormallycarried
6、outthroughISOtechnicalcommittees.Eachmemberbodyinterestedinasubjectforwhichatechnicalcommitteehasbeenestablishedhastherighttoberepresentedonthatcommittee.Internationalorganizations,governmentalandnon-governmental,inliaisonwithISO,alsotakepartinthework.ISOcollaboratescloselywiththeInternationalElectr
7、otechnicalCommission(IEC)onallmattersofelectrotechnicalstandardization.TheproceduresusedtodevelopthisdocumentandthoseintendedforitsfurthermaintenancearedescribedintheISO/IECDirectives,Part1.Inparticular,thedifferentapprovalcriterianeededforthedifferenttypesofISOdocumentshouldbenoted.Thisdocumentwasd
8、raftedinaccordancewiththeeditorialrulesoftheISO/IECDirectives,Part2(seeWWW.iso.org/directives).ISOdrawsattentiontothepossibilitythattheimplementationofthisdocumentmayinvolvetheuseof(八)patent(三).ISOtakesnopositionconcerningtheevidence,validityorapplicabilityofanyclaimedpatentrightsinrespectthereof.As
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- ISO 25178-605 2025 25178 605
